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Irradiation device Product List and Ranking from 139 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
This ranking is based on the number of page views on our site.

Irradiation device Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
This ranking is based on the number of page views on our site.

  1. たけでん UVシステム G Osaka//Industrial Machinery
  2. 岩崎電気株式会社 アイグラフィックス社 産業機器営業部 Osaka//Industrial Electrical Equipment
  3. サーマプレシジョン Tokyo//others
  4. 4 岩崎電気 光・環境事業部 Saitama//Optical Instruments
  5. 5 兼松ＰＷＳ Kanagawa//Industrial Machinery
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Irradiation device Product ranking

Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
This ranking is based on the number of page views on our site.

  1. Projection Exposure Device "MRS Series" adopts UV-LED light source. サーマプレシジョン
  2. Air conditioning auxiliary device "Air Polator System" たけでん UVシステム G
  3. Scratch on the substrate can be removed! Solder resist repair pen 大道産業
  4. 4 High-frequency device compatible low dielectric fluorine-based interlayer insulating film 'AL-X'
  5. 5 UV irradiation device with nitrogen purge conveyor capable of UV irradiation under a nitrogen atmosphere. 岩崎電気株式会社 アイグラフィックス社 産業機器営業部

Irradiation device Product List

1～30 item / All 382 items

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Reel-type plasma irradiation device (mass production model)

Reel-type plasma irradiation device (mass production model)

Plasma treatment for both sides or one side is possible with a roll-to-roll process up to 500mm in width.

The "Roll-to-Roll Plasma Irradiation Device" is an irradiation device capable of processing roll-to-roll widths of up to 500mm. We also accept contract processing for rolls narrower than 500mm. The standard type of device can accommodate widths of up to 1000mm; for other widths, please consult us. 【Features】 ■ Capable of processing roll-to-roll widths of up to 500mm ■ Plasma irradiation can be applied to both sides or one side, processed in a roll-to-roll manner ■ The standard type of device can accommodate widths of up to 1000mm *For more details, please refer to the PDF materials or feel free to contact us.

  • Other physicochemical equipment
  • Irradiation device

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Belger-type Vacuum Plasma Irradiation Device (Test Equipment)

Belger-type Vacuum Plasma Irradiation Device (Test Equipment)

Free plasma irradiation tests in progress! Quick irradiation even for small samples. Exhibition participation.

The "Belger-type Vacuum Plasma Irradiation Device" is a device that enables rapid plasma irradiation even for small samples. By using a unique power supply and electrodes, it demonstrates excellent plasma irradiation effects, achieving surface treatment with no changes over time. With a transparent glass chamber, it is possible to observe subtle changes inside during plasma treatment. You can discover plasma irradiation conditions suitable for your samples and build your own unique know-how. [Examples of Applications] ■ Strength enhancement of carbon fiber composites ■ Improvement of wettability of petri dishes ■ Low-invasive cell culture ■ Improvement of wettability of chemicals on fluorine-based resin surfaces *For more details, please refer to the PDF materials or feel free to contact us. ★ Free plasma irradiation tests are currently being conducted We offer trial irradiation treatments for up to three conditions for the first time. Experience the effects for yourself. Processing of plate-shaped samples is also possible.

  • Other physicochemical equipment
  • Irradiation device

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Vacuum Plasma Irradiation Device

Vacuum Plasma Irradiation Device

Gentle surface modification for the interface with cells! Control of the density of hydrophilic and hydrophobic groups.

The "Vacuum Plasma Irradiation Device" is a device that gently modifies the surface in contact with cells to be cell-friendly. It can freely modify the resin surface to be either hydrophilic or hydrophobic, allowing for processing under optimal conditions. We find the most suitable plasma irradiation conditions for various materials. We also accept contract processing. 【Features】 ■ Powerful and uniform irradiation with no processing unevenness ■ Minimal etching effect, resulting in almost no physical damage to materials ■ High-density functional groups can be generated, enabling direct bonding without adhesives ■ Extremely low regression of functional groups ■ Extremely low gas consumption *For more details, please refer to the PDF document or feel free to contact us.

  • Other physicochemical equipment
  • Irradiation device

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Ultraviolet irradiation device [from curing experiments to production line use!]

Ultraviolet irradiation device [from curing experiments to production line use!]

UV irradiation equipment that supports everything from curing experiments to production lines! Equipped with lamps that have emission lengths tailored to work sizes, achieving cost-effectiveness and shorter delivery times!

This is a UV irradiation device that accommodates everything from curing experiments to production line use. It is equipped with lamps that have a light-emitting length corresponding to the work size, achieving cost-effectiveness and shorter delivery times with a conveyor-equipped irradiation system. It has a proven track record of delivery to many major companies, including Sony and Seiko Epson. 【Features】 - A versatile series designed for cost-effectiveness and shorter delivery times. - Can be widely used from curing experiments to production. - Equipped with a dimming function (60%). - Compact and space-saving. *For more details, please request materials or view the PDF data available for download.

  • Marking machine
  • Irradiation device

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Infrared heating and drying process solutions

Infrared heating and drying process solutions

We have a proven track record of deliveries to a wide range of industries! Leave the heater unit design and process improvements to us.

At Exelitas Noble Light Japan (formerly Heraeus Noblelight Japan), we propose "infrared heating and drying process solutions" to various industries, including automotive, building materials, textiles, and food. Through meetings and experiments with our customers, we provide solutions to the heating and drying challenges they face, including irradiation tests and heater unit design. 【Applications】 ■ Automotive ■ Resin Sheets ■ CFRP Molding ■ Thermal Welding ■ Metals ■ Mold Preheating ■ Glass ■ Vacuum Heating ■ Printing ■ Textiles ■ Printed Electronics ■ Coating ■ Woodworking ■ Food, etc. *For more details, please refer to the PDF materials or feel free to contact us.

  • Heating device
  • Irradiation device

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High-power non-electrode ultraviolet (UV) irradiation device

High-power non-electrode ultraviolet (UV) irradiation device

The ultraviolet light emission efficiency is high, and the illuminance is high! That's why the finishing quality after UV curing is different! It can instantly light up and relight in seconds!

The "Electrode-less UV Lamp" from Excellitas Noble Light (formerly Heraeus Noblelight) utilizes the same microwave energy (2450MHz) as that used in microwave ovens. Since there are no electrodes, the ends of the lamp bulb do not blacken, providing many advantages such as stable light output, low heat generation, and long lifespan. Additionally, the light source can be arranged to construct a wide-width system. 【Features】 ■ High output ■ Output stability ■ Low heat generation ■ Long lifespan ■ Various UV wavelengths ■ Instant lighting *For more details, please feel free to contact us.

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  • Ultraviolet irradiation equipment
  • Irradiation device

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Infrared Heating Technology Series You Should Know: 'Types of Industrial Heating'

Infrared Heating Technology Series You Should Know: 'Types of Industrial Heating'

The first installment of the "Must-Know Series" related to infrared heating and drying processes! An explanation of heating, which is essential in the production process, accompanied by illustrations!

The "Infrared Heating Technology Series" is a technical document by Excelsius Noble Light (formerly Heraeus Noblelight), a manufacturer of industrial special light sources, covering the wavelength range from vacuum ultraviolet to medium-wavelength infrared. It explains various types of heating essential to production processes, accompanied by illustrations. 【Contents (excerpt)】 ■ What is Direct Heating? ■ What is Conduction Heating? ■ What is Convection Heating? and more *For more details, please refer to the PDF document or feel free to contact us.

  • Other heaters
  • Irradiation device

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Infrared Light Processes Contributing to Decarbonization That You Should Know About

Infrared Light Processes Contributing to Decarbonization That You Should Know About

Utilizing electric heating and drying systems in production sites contributes to decarbonization! Productivity is improved with an irradiation efficiency of 95%.

In recent years, decarbonization in production sites has become an important issue to address. The Excellitas infrared heater is coated with a gold reflective film, achieving an irradiation efficiency of 95% for the infrared radiation emitted from the heater. This irradiation efficiency is a crucial factor that significantly impacts process efficiency when using infrared heaters. The key point is "how much infrared light emitted from the light source can be directly irradiated onto the target object." This achievement rate leads to high heating efficiency and contributes to energy savings. Additionally, for use in production sites, the safety and excellent response performance inherent to electric heaters, along with Excellitas's unique quartz twin-tube shape that offers superior mechanical strength, are also notable features. The glass tube is made of high-purity transparent quartz glass, making it suitable for clean heating. There are also other advantages, such as: - High infrared transmission rate - No thermal unevenness within the effective length - Compatible with hot air use - Easy efficiency improvement through retrofitting existing hot air furnaces - Space-saving design *For more details, please download the PDF or feel free to contact us.

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  • Other heaters
  • Heating device
  • Electric furnace
  • Irradiation device

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Light processes for hardening, drying, lamination, embossing, and stretching.

Light processes for hardening, drying, lamination, embossing, and stretching.

Introducing examples and benefits of converting! What are the UV (ultraviolet) curing process and infrared heating and drying process to improve productivity?

In converting processes such as preheating, drying, laminating, and embossing, the characteristics of infrared are effectively utilized in various fields. Web materials like plastics, films, paper, and non-woven fabrics require heat for processes such as coating, laminating, and drying. Excelsius's infrared heaters are high-powered and can heat materials quickly, uniformly, and appropriately. Additionally, manufacturers and coaters in the wide web converting and silicone processing sectors utilize excellent UV curing technology, which enables high productivity, functional characteristics, and coating of heat-sensitive substrates. Excelsius (formerly Heraeus Noblelight) is a manufacturer of industrial special light sources that covers the wavelength range from vacuum ultraviolet to medium-wave infrared. UV curing and infrared heating that enhance productivity are being adopted in many industries. 【Case Studies Included】 ■ Embossing and laminating using infrared ■ Coating and drying using infrared ■ Drying textiles using infrared ■ UV curing of silicone release paper and transfer paper ■ UV curing of window films

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  • Other heaters
  • Heating device
  • Ultraviolet irradiation equipment
  • Irradiation device

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Presentation of technical data! What is needed for water disinfection equipment to meet the demand for increased water treatment capacity.

Presentation of technical data! What is needed for water disinfection equipment to meet the demand for increased water treatment capacity.

What kind of ultraviolet (UV) lamp is required for water sterilization devices to meet the increased demand for processed water volume?

Due to climate change such as rising temperatures from global warming and the increasing world population, many issues related to water resources are occurring around us. In Japan, high-quality water treatment devices have been developed and implemented, but it is believed that the demand for water will become increasingly stringent in the future. Therefore, this document explains what is required of ultraviolet (UV) lamps installed in water disinfection devices. [Contents (excerpt)] - What kind of lamps can meet the future increase in water treatment? - What is ultraviolet disinfection? - Types and characteristics of UV lamps used in water treatment, etc. *For more details, please refer to the PDF document or feel free to contact us.

  • Water treatment equipment
  • UV/Ozone Sterilization Systems and Equipment
  • Ultraviolet sterilization device
  • Irradiation device

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Application to UV Coating

Application to UV Coating

Examples of applications of UV LED curing technology used in the coating industry.

UV LED curing technology is also used in the painting industry. The reasons are its low operating costs, advanced system performance due to solid-state devices, the ability to create a safe workplace environment, and the absence of hazardous substances. It can be used for painting wood and vinyl, such as floors, cabinets, and doors, as well as for automotive and musical instruments, and for industrial products like electronic devices, fittings, and tiles. [Examples of applications in the UV painting field] ■ Wood ■ Vinyl ■ Automotive ■ Musical instruments ■ Fittings ■ Others *For more details, please refer to the PDF materials or feel free to contact us.

  • LED Module
  • Painting Machine
  • Irradiation device

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WhisperCure LED Technology

WhisperCure LED Technology

Powerful, quiet, and safe curing! It leads to increased productivity and profitability.

"WhisperCure Technology" utilizes patented innovative technology unique to Foseon to provide unparalleled and attractive solutions. By offering high-output air-cooled lamps that generate only minimal noise compared to conventional options, it contributes to the realization of a safe working environment. Additionally, it achieves an increase in UV output while maintaining the size of the Foseon unit. This allows machine manufacturers to produce large, high-output air-cooled systems that previously required water cooling without additional cooling equipment. [Features] - High-performance applications through maximization of peak illuminance - Compliance with regulations by keeping the noise of LED curing systems below required limits - Improvement in productivity and profitability through enhanced communication among operators *For more details, please refer to the PDF materials or feel free to contact us.

  • LED Module
  • Ultraviolet irradiation equipment
  • Irradiation device

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If you are going to conduct phototoxicity tests, use a sunlight irradiation device.

If you are going to conduct phototoxicity tests, use a sunlight irradiation device.

Phototoxicity testing for pharmaceuticals and cosmetics is best conducted with solar light irradiation equipment!

Reproduces natural sunlight with utmost fidelity Ideal sunlight irradiation device for phototoxicity testing 【Features】 ○ The amount of UV-A irradiation included in the radiation light is 2.5 mW/cm² or more ○ Heat from infrared is almost completely cut off ○ Continuously adjustable light intensity within the adjustment range ○ Adjustable irradiation distance by changing the height of the stage ○ Input voltage: 3φ200V 50/60Hz ○ Input current: 15A ○ Effective irradiation area: 350×350mm ● For other functions and details, please contact us.

  • Image Processing Equipment
  • Other lighting equipment
  • Irradiation device

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Near-infrared irradiation device LA-100IR suitable for appearance inspection and internal inspection.

Near-infrared irradiation device LA-100IR suitable for appearance inspection and internal inspection.

Wavelength 800-1100nm compatible, an ideal near-infrared illumination device for IR transmission imaging.

Near-infrared device that only emits near-infrared rays from halogen lamps 【Features】 ○ Built-in halogen lamp with near-infrared reflective mirror and IR80 filter (transmits above 800nm) Emits near-infrared rays (800-1100nm) without visible light ○ Rated input voltage: AC100V-120V / 200V-240V ○ Rated input frequency: 50/60Hz ○ Power consumption: 130W ○ Lamp type: JCR12V100W10H/IR Halogen lamp with near-infrared reflective mirror ○ Ignition method: DC ignition method For other functions and details, please download the catalog.

  • Lighting for image processing
  • Defect Inspection Equipment
  • Other lighting equipment
  • Irradiation device

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UV LED irradiator

UV LED irradiator

UV LED irradiator

High-output UV-LEDs are adopted, and high light output is achieved through high-quality condensing lenses. Additionally, the controller section can be programmed flexibly for various application scenarios via keyboard input or USB communication, allowing for customizable irradiation methods.

  • Microscope
  • Irradiation device

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Industrial UV Meter / Model Number M1026VR-T2T

Industrial UV Meter / Model Number M1026VR-T2T

By managing conveyor speed, ramp intensity distribution, and replacement timing, we can improve your yield.

The M1026VR-T2T is ideal for managing lamp intensity in UV irradiation devices used for curing, sealing and adhesive processing of electrical and electronic components, printing, drying, and mounting lines for printed circuit boards, as well as sterilization processes in various industries. *Various light-receiving and display units are sold separately, so please select the light-receiving unit according to your application and combine it with the display unit. Four types of light-receiving units are available to match the desired wavelength (please select at the time of purchase). It is equipped with a function to automatically recognize the four types of light-receiving units.

  • Spectroscopic Analysis Equipment
  • Irradiation device

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UV Meter (UVA/UVB) / Model Number MF6UVAB-451F

UV Meter (UVA/UVB) / Model Number MF6UVAB-451F

●UVA/UVB ●2 range switching function ●Low battery indicator ●Over range indicator

● The ultraviolet wavelength range covers 290nm to 390nm (UVA and UVB regions) ● High-precision measurement below 1,999μW/cm² in the low range ● The sensor is a user-friendly separated type

  • Other measurement, recording and measuring instruments
  • Irradiation device

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UV irradiation machine

UV irradiation machine

UV lamp necessary for curing UV paint.

UV coating is increasing sales in the building maintenance industry.

  • Resin processing machine
  • 3D Printer
  • Other surface treatment equipment
  • Irradiation device

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High-Power Ultraviolet Irradiation Device 'UVflasher TX2000'

High-Power Ultraviolet Irradiation Device 'UVflasher TX2000'

Achieve instant hardening! An environmentally friendly high-output ultraviolet irradiation device using pulse light! It can also be integrated into automatic manufacturing lines!

The "UVflasher TX2000" is a UV irradiation device that emits ultraviolet light through powerful pulse emission, achieving resin curing in a much shorter time with less heat generation compared to continuous emission methods. Since it uses xenon gas, it has a low environmental impact, and settings such as emission voltage and pulse count can be easily adjusted to meet specific needs. A dedicated software is included as standard, allowing for immediate use after installation. This product can be easily integrated into automated production lines in addition to standalone use, contributing to increased productivity. 【Features】 ■ Highly efficient UV irradiation device using xenon flash lamps ■ Emits high-output ultraviolet light in a short time, achieving instant curing ■ Suppresses thermal deformation and thermal degradation damage to the irradiated object ■ Contributes to significant reduction in power consumption compared to other light source methods ■ Quick startup after power-on, enabling immediate operation *For more details, please refer to the catalog or feel free to contact us.

  • Sterilizer
  • Ultraviolet irradiation equipment
  • Coater
  • Irradiation device

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No rear alignment! Single-sided automatic mask aligner AMA6000

No rear alignment! Single-sided automatic mask aligner AMA6000

By eliminating back alignment, we achieved a low price and compact design, making it an ideal device for small-batch production of various types.

The "AMA6000" is an automatic batch equal exposure mask alignment device. The ASAP mask aligner manages the gap between the mask and the wafer in a completely non-contact manner. While it can operate in non-contact mode, it also supports soft and hard contact. It achieves low cost, compact size, and easy operation. 【Features】 ■ Parallel exposure in complete non-contact ■ Space-saving & easy maintenance ■ Auto alignment ■ Achieves low cost and compact design, suitable for small-batch production of various types *For more details, please refer to the PDF document or feel free to contact us.

  • others
  • Irradiation device

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三明MEMS【露光装置/マスクアライナー/ローコスト（低価格）】

三明MEMS【露光装置/マスクアライナー/ローコスト（低価格）】

研究開発から、少LOT多品種、量産まで対応する「手動・半自動・全自動」のローコストな露光装置/マスクアライナーをご提案！

　株式会社三明では、コンパクトな微細露光のスタンダード機「LAシリーズ片面マスクアライナー」や、 両面プロセスのローコストアシストモデル「BAシリーズ正面マスクアライナー」、両面・多面プロセスの スタンダード量産機である「BSシリーズ両面同時露光マスクアライナー」といった手動型の露光機をはじめ、 少ロット多品種から量産まで対応した半自動の「セミオートマスクアライナー」や全自動の「フルオートマスクアライナー」など、 優れたローコストな露光装置を多数取り揃えております。 ＊詳しくはお問い合わせ、もしくはカタログをご覧ください。

  • Wafer processing/polishing equipment
  • Irradiation device

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Component-type mask aligner ES20

Component-type mask aligner ES20

Low-cost single-sided aligner of the ES series

We build up the optimal mask aligner tailored to your specifications and budget. By selecting only the necessary units and options from various choices, we can create an easy-to-use device that minimizes unnecessary costs. We will listen to your requests and propose the best specifications. Additionally, most units can be added or replaced later, allowing for future upgrades and reductions in initial installation costs. You can choose from two types of UV light source devices (various exposure sizes) that accommodate samples from φ1 to 4 inches (including custom shapes like square samples) and masks from 2 to 5 inches. You can also select from various observation microscopes, including CCD cameras, stereo, and eyepiece types. It is compact and low-cost. For more details, please contact us or refer to the catalog.

  • Other inspection equipment and devices
  • Irradiation device

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Experimental/Research Mask Aligner ES410

Experimental/Research Mask Aligner ES410

A mask aligner with sufficient functionality for photolithography at a low cost.

The ES410 mask aligner for experiments and research is a low-cost device that possesses sufficient functions necessary for photolithography. It is a fully manual machine suitable for various experiments, research, and learning about photolithography. With the wide customization options unique to the ES series, it can be set up to better fit specific purposes by selecting various units and options. Most units can be added or changed later, allowing for future upgrades. For more details, please contact us or refer to the catalog.

  • Other inspection equipment and devices
  • Irradiation device

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High-Performance Mask Aligner LA Series

High-Performance Mask Aligner LA Series

Compact fine exposure standard machine. 4/6/8 inch standard mask aligner.

The high-performance mask aligner LA series is a standard device for compact fine exposure with 4/6/8 inch standard mask aligners. It is an exposure device capable of high-resolution pattern exposure in research fields requiring photolithography, such as semiconductor device fabrication. It is equipped with a specially designed dual-objective two-field CCD microscope, allowing alignment of small samples with a minimum objective lens spacing of 18mm. It features a wipe device for simultaneous two-field monitoring display, and the Z-axis is driven by air pressure with a gap fine adjustment lever. It supports hard contact, soft contact, and proximity exposure. The parallel mechanism employs reliable spherical bearings for compactness and high versatility. For more details, please contact us or refer to the catalog.

  • Other inspection equipment and devices
  • Irradiation device

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Dual-Sided Simultaneous Exposure Mask Aligner BS320

Dual-Sided Simultaneous Exposure Mask Aligner BS320

Simultaneous exposure of both sides of the wafer. Supports medium lot production with semi-automatic operation!

The BS320 dual-sided simultaneous exposure mask aligner has a proven track record in research and development as well as small to medium lot production. It adopts a method where the primary exposure is done simultaneously on both sides, and subsequent exposures are done one side at a time, making it a simple and versatile model. Customization to meet various needs is also available. Since the subsequent exposures are done on one side, a separate "sample stage" is required. The BS320u, which allows for simultaneous dual-sided exposure even after the primary exposure, is also part of the lineup. It supports semi-automatic operation for medium lot production. For more details, please contact us or refer to the catalog.

  • Other inspection equipment and devices
  • Irradiation device

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Dual-Sided Simultaneous Exposure Mask Aligner 'BS425' 'BS620'

Dual-Sided Simultaneous Exposure Mask Aligner 'BS425' 'BS620'

Simultaneous exposure of both sides of the wafer! Supports medium lot production with semi-automatic operation.

The dual-sided simultaneous exposure mask aligners 'BS425' and 'BS620' have a proven track record in both research and development and small to medium lot production. They adopt a method where the primary exposure is simultaneous on both sides, and subsequent exposures are done one side at a time, making them simple and versatile, with customization available to meet specific needs. Since the secondary exposure and beyond are done on one side, a separate "sample stage" is required. Please feel free to contact us. 【Features】 ■ Supports maximum φ4 inch wafers 'BS425' ■ Supports maximum φ6 inch wafers 'BS620' ■ Compact design ■ Semi-automatic operation possible during primary exposure with a footswitch ■ Easy to accommodate non-standard shape samples due to the hand placement style ■ Equipped with wafer positioning guide (optional) and more *For more details, please refer to the catalog or feel free to contact us.

  • Other semiconductor manufacturing equipment
  • Irradiation device

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SecurityEye-24LDS

SecurityEye-24LDS

Eye Safe Laser Near Infrared Irradiation Device

Capable of clearly illuminating targets in the darkness over 300 meters away with near-infrared light.

  • Surveillance Camera System
  • Irradiation device

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UV Stick(TM) (Straight Tube Type UV-LED Irradiation Module)

UV Stick(TM) (Straight Tube Type UV-LED Irradiation Module)

The UV-Stick(TM) is an unprecedented UV-LED irradiation module that can emit light in 360 degrees [patent pending].

The UV-Stick(TM) uses UV-LEDs as its light source and is a UV-LED light source module that can emit light in a 360-degree manner, similar to a lamp. Additionally, it does not generate heat in the emitting part, allowing for long-duration irradiation over a wide area. By using quartz glass in the emitting part and implementing deep ultraviolet LEDs, it is a new type of UV-LED light source module that can also irradiate the deep ultraviolet (UVC) region below 300nm. 【Features】 - 360-degree light emission: Ideal for wide-area irradiation - Long-duration irradiation possible: Minimal heat impact from the light source due to the small number of LEDs. 【Applications】 - Sterilization, pest control for agricultural products, resin curing/adhesion, photochemical reactions, etc.

  • LED Module
  • Ultraviolet irradiation equipment
  • LED lighting
  • Irradiation device

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Double-sided mask aligner

Double-sided mask aligner

Both-side alignment and the ability for proximity and soft contact exposure are possible.

It is a mask aligner that aligns a glass mask and a workpiece in the photolithography process for wafers and glass substrates, transferring a fine mask pattern onto the photoresist coated on the plate.

  • Stepper
  • Irradiation device

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Parallel light exposure device

Parallel light exposure device

Here is the lineup of parallel light exposure devices.

As a uniform irradiation light source, it is used for various applications such as precision pattern exposure, pattern exposure of semiconductor device elements, and wafer exposure.

  • Stepper
  • Irradiation device

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